Degradation mechanisms in AlGaN/GaN HEMTs submitted to off and on-state stress conditions

This paper describes a deep investigation of the degradation mechanisms induced by off-state and on-state stress in AlGaN/GaN HEMTs. Concerning reverse-bias degradation, results underline that the exposure to reverse-bias stress can induce (i) a recoverable change in the gate current due to the accumulation of negative charges under the gate, (ii) and a permanent degradation of gate characteristics due to the generation of vertical parasitic leakage paths through the AlGaN layer. Further analysis of the kinetics of this degradation mechanism, correlated with time-resolved Electroluminescence (EL) measurements, allowed to define a model that explains the time-dependence of the phenomenon and the role of gate voltage as accelerating factor, providing an interpretation for both recoverable and permanent modifications of the main device characteristics induced by reverse-bias stress. On the other hand, on devices that have shown an improved robustness against the reverse-bias gate degradation, we investigated the origin of the degradation under on-state stress. In this case, results obtained with a combined electrical and optical analysis, showed that on-state stress may induce a significant decrease in drain saturation current and electroluminescence (EL) signal, with a degradation rate that strongly depends on the EL intensity measured before stress, which is representative of the presence of hot-electrons in the channel. On-state degradation can be ascribed to a decrease in the electric-field, due to the trapping of electrons within the barrier or at the surface induced by hotelectrons. Therefore, using the EL signal as measure of the stress accelerating factor, it was possible to derive an acceleration law for hot-electron degradation on GaN HEMTs.