The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered by the sawtooth-like driving signal. This paper proposes a novel closed-loop tracking controller for improving the linearity of the trace motion, and hence the image brightness. It includes a feedforward action to achieve the required tracking performance under nominal conditions, and a feedback control for robustness against disturbances and other nonidealities. Notch filtering prevents resonance-induced ringing. The simplicity of the architecture enables an easy implementation on FPGA or ASIC. Experimental tests carried out on two different micromirrors with Lead-Zirconate-Titanate (PZT) piezoelectric actuation and piezoresistive sensing demonstrate an average linearity of (Formula presented.) and reproducibility of (Formula presented.) for sawtooth reference trajectories with up to (Formula presented.) amplitude and 120 Hz frequency, thus meeting the performance requirements mandated by the standards for high-resolutions projection applications.
Control of a quasi-static MEMS Mirror for raster scanning projection applications
Antonello R.;Oboe R.;
2024
Abstract
The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered by the sawtooth-like driving signal. This paper proposes a novel closed-loop tracking controller for improving the linearity of the trace motion, and hence the image brightness. It includes a feedforward action to achieve the required tracking performance under nominal conditions, and a feedback control for robustness against disturbances and other nonidealities. Notch filtering prevents resonance-induced ringing. The simplicity of the architecture enables an easy implementation on FPGA or ASIC. Experimental tests carried out on two different micromirrors with Lead-Zirconate-Titanate (PZT) piezoelectric actuation and piezoresistive sensing demonstrate an average linearity of (Formula presented.) and reproducibility of (Formula presented.) for sawtooth reference trajectories with up to (Formula presented.) amplitude and 120 Hz frequency, thus meeting the performance requirements mandated by the standards for high-resolutions projection applications.
Pubblicazioni consigliate
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
