The anomalous diffusion of Fe implanted into InP has been studied by SIMS and TEM. From the close correspondence, observed in the annealed samples, between the positions of the two Fe accumulation peaks around R-p + Delta R-p and the positions of the end of range loops and of the bottom interface of the twin band, respectively, it is suggested that the Fe distribution can be affected by gettering at the mentioned crystal defects. The origin of the Fe peak at 0.8 R-p is also discussed.
Distribution of Fe and extended defects in Fe-implanted InP
CARNERA, ALBERTO;GASPAROTTO, ANDREA;
1997
Abstract
The anomalous diffusion of Fe implanted into InP has been studied by SIMS and TEM. From the close correspondence, observed in the annealed samples, between the positions of the two Fe accumulation peaks around R-p + Delta R-p and the positions of the end of range loops and of the bottom interface of the twin band, respectively, it is suggested that the Fe distribution can be affected by gettering at the mentioned crystal defects. The origin of the Fe peak at 0.8 R-p is also discussed.
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