This handbook covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It contains helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives
OBOE, ROBERTO;
2005
Abstract
This handbook covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It contains helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
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