Pulsed laser crystallization of sol-gel derived cerium oxide thin films

Cerium oxide sol-gel-derived thin films were crystallized by pulsed excimer laser annealing (ELA). X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman Spectroscopy (RS), and Fourier transform infrared (FTIR) were employed to analyze the effect of laser fluence and number of pulses on the structural and morphological properties of the irradiated films. XRD and RS results, supported by thermal simulations, confirmed crystallization into cubic cerium oxide starting from 40 mJcm −2 . SEM micrographs showed that an increased number of pulses induced the formation of porous and complex nanostructured surfaces, different from the morphology obtained on thermally annealed films. Finally, water contact angle measurements revealed that the films showed a characteristic hydrophobic “petal effect”.