Optical elements working at 121.6nm make use of Al and MgF2. We analyzed monoand bi-layers of these materials, deposited by e-beam evaporation, and discussed how substrate temperatures and annealing affect their performances. © 2015 OSA.
Efficiency of VUV optical materials according to variations in deposition conditions
M. Nardello;A. J. Corso;P. Zuppella;F. Gerlin;E. Tessarolo;D. Bacco;M. G. Pelizzo
2015
Abstract
Optical elements working at 121.6nm make use of Al and MgF2. We analyzed monoand bi-layers of these materials, deposited by e-beam evaporation, and discussed how substrate temperatures and annealing affect their performances. © 2015 OSA.
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