Quantum efficiency measurement on a CCD detector in the 0.3-1100 nm spectral region

The performances of a CCD have been evaluated in a very wide spectral region, which comprises near IR, visible, near and far UV, EUV and soft X-ray spectral regions. The CCD detector is a back illuminated one, 512 × 512 format, 24 × 24 μm2 pixel. The performed measurements consist mainly on the determination of the quantum efficiency in the 0.3-1100 nm (4.5 keV-1 eV) spectral region. Three different experimental setup have been used: a Czerny-Turner monochromator for the 1100-250 nm region, a Johnson-Onaka monochromator for the 250-30 nm region, and a grazing incidence Rowland monochromator for the 25-0.3 nm region. The tested CCD exhibits high values of quantum efficiency in the analyzed spectral range, representing a very useful detector of radiation in the extended optical domain.