Nano-fabrication and characterization of silicon meta-surfaces provided with Pancharatnam-Berry effect

In this paper, the implementation of optical elements in the form of Pancharatnam- Berry optics is considered. With respect to 3D bulk and diffractive optics, acting on the dynamic phase of light, Pancharatnam-Berry optical elements transfer a phase that is geometric in nature by locally manipulating the polarization state of the incident beam. They can be realized as space-variant sub-wavelengths gratings that behave like inhomogeneous form-birefringent materials. We present a comprehensive work of simulation, realization, and optical characterization at the telecom wavelength of 1310 nm of the constitutive linear grating cell, whose fabrication has been finely tuned to get a ϕ-phase delay and obtain a maximum in the diffraction efficiency. The optical design in the infrared region allows the use of silicon as candidate material due to its transparency. In order to demonstrate the possibility of assembling the single grating cells for generating more complex phase patterns, the implem...