Thick films have bulk like properties. In this paper it is explored the possibility to sputter 70 micron thick films in order to get rid of the Q-slope in Niobium sputtered Copper Cavities. An innovative method based on the multi-layer deposition of zero-stress single layers is re-ported. The deposition of zero-stress thick films into 6 GHz Copper seamless cavities, has shown the possibility to obtain straight curves for the Q-factor versus acceler-ating fields.
The way of thick films toward a flat Q-curve in sputtered cavities
V. Palmieri
;S. Cisternino
;FRANCO LESPINASSE, DANIEL ADRIEN
;PIRA, CRISTIAN
;SKLIAROVA, HANNA
;F. Stivanello
;VAGLIO, RUGGERO
2018
Abstract
Thick films have bulk like properties. In this paper it is explored the possibility to sputter 70 micron thick films in order to get rid of the Q-slope in Niobium sputtered Copper Cavities. An innovative method based on the multi-layer deposition of zero-stress single layers is re-ported. The deposition of zero-stress thick films into 6 GHz Copper seamless cavities, has shown the possibility to obtain straight curves for the Q-factor versus acceler-ating fields.
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