We investigate the heavy-ion irradiation effects on Oxide-Nitride-Oxide (ONO) capacitors. After irradiation we measure a leakage current decreasing in time. Electrical stresses demonstrate that irradiation does not reduce the endurance of these devices.
Oxide–Nitride–Oxide Capacitor Reliability Under Heavy-Ion Irradiation
CESTER, ANDREA;A. Paccagnella
2007
Abstract
We investigate the heavy-ion irradiation effects on Oxide-Nitride-Oxide (ONO) capacitors. After irradiation we measure a leakage current decreasing in time. Electrical stresses demonstrate that irradiation does not reduce the endurance of these devices.
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