Zinc-oxide nanoparticles embedded in silica glass were fabricated by ion implantation of Zn + ions of 130 keV and up to a dose of 2×10 17 ions/cm 2, followed by thermal annealing in O 2 atmosphere at 800°C and for 1h. Glancing-incidence x-ray diffraction and transmission electron microscopy results show zinc crystalline nanoclusters with an average diameter of 13nm and placed around a R p=70nm, in the as-implanted sample. The thermal oxidation promotes the diffusion of the Zn atoms preferentially towards the surface of the silica where ZnO particles of 65nm in diameter where found and a small diffusion toward the bulk where ZnO clusters of 5nm in diameter were observed. A relatively strong exciton emission peak from the ZnO particles was observed in the photo-luminescence spectrum at 380nm.
On the structural and optical properties of ZnO nanoparticles formed in silica by ion implantation
MATTEI, GIOVANNI;MAZZOLDI, PAOLO;PELLEGRINI, GIOVANNI;BELLO, VALENTINA;
2006
Abstract
Zinc-oxide nanoparticles embedded in silica glass were fabricated by ion implantation of Zn + ions of 130 keV and up to a dose of 2×10 17 ions/cm 2, followed by thermal annealing in O 2 atmosphere at 800°C and for 1h. Glancing-incidence x-ray diffraction and transmission electron microscopy results show zinc crystalline nanoclusters with an average diameter of 13nm and placed around a R p=70nm, in the as-implanted sample. The thermal oxidation promotes the diffusion of the Zn atoms preferentially towards the surface of the silica where ZnO particles of 65nm in diameter where found and a small diffusion toward the bulk where ZnO clusters of 5nm in diameter were observed. A relatively strong exciton emission peak from the ZnO particles was observed in the photo-luminescence spectrum at 380nm.
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