In this paper an inverse problem has been tackled: the reconstruction of an equivalent source of a magnetron sputtering device. A set of measurements of DC magnetic flux density has been done on the surface of one cathode, and an equivalent model has been derived, and implemented on a 2D commercial code. The numerical results are in good agreement with the experimental data.
Reconstruction of an equivalent magnetostatic source of a magnetron sputtering device
DESIDERI, DANIELE;MASCHIO, ALVISE;
2010
Abstract
In this paper an inverse problem has been tackled: the reconstruction of an equivalent source of a magnetron sputtering device. A set of measurements of DC magnetic flux density has been done on the surface of one cathode, and an equivalent model has been derived, and implemented on a 2D commercial code. The numerical results are in good agreement with the experimental data.
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