The utilization of single-source molecular precursors in chemical vapor deposition (CVD) experiments requires a deep knowledge of their chemico-physical properties, with particular regard to thermal stability and fragmentation pattern. This study describes the synthesis and characterization of zinc bis(O-isopropylxanthate), Zn(O-iPrXan)2, [O-iPrXan = (CH3)2CHOCS2], a single-source precursor for the CVD of zinc(II) sulfide thin films and nanorods. Several analytical methods yielding complementary information (extended X-ray absorption fine structure, Raman, FT-IR, UV–Vis optical absorption, 1H and 13C NMR, thermogravimetric analysis, differential scanning calorimetry as well as mass spectrometry techniques, i.e. electrospray and electron ionization, mass-analyzed ion kinetic energy) are adopted for a comprehensive investigation of purity, structure, thermal behavior and decomposition pathways of the molecule. The most significant results are discussed critically and the properties useful for CVD applications are highlighted.
Synthesis and characterization of zinc bis(O-isopropylxanthate) as single-source chemical vapor deposition precursor for ZnS
GASPAROTTO, ALBERTO;MARAGNO, CINZIA;TONDELLO, EUGENIO;
2005
Abstract
The utilization of single-source molecular precursors in chemical vapor deposition (CVD) experiments requires a deep knowledge of their chemico-physical properties, with particular regard to thermal stability and fragmentation pattern. This study describes the synthesis and characterization of zinc bis(O-isopropylxanthate), Zn(O-iPrXan)2, [O-iPrXan = (CH3)2CHOCS2], a single-source precursor for the CVD of zinc(II) sulfide thin films and nanorods. Several analytical methods yielding complementary information (extended X-ray absorption fine structure, Raman, FT-IR, UV–Vis optical absorption, 1H and 13C NMR, thermogravimetric analysis, differential scanning calorimetry as well as mass spectrometry techniques, i.e. electrospray and electron ionization, mass-analyzed ion kinetic energy) are adopted for a comprehensive investigation of purity, structure, thermal behavior and decomposition pathways of the molecule. The most significant results are discussed critically and the properties useful for CVD applications are highlighted.Pubblicazioni consigliate
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