Application of a large range AFM to conventional roughness analysis is presented, through a series of measurements on different roughness calibration standards. After extraction of single profiles from the three-dimensional data set, roughness can be evaluated in compliance with ISO standards. Profiles from the large range AFM were compared with those obtained using a traceable stylus instrument. The results show a good agreement, in particular when artefacts with higher roughness are measured.
Roughness measurements with an AFM-CMM instrument
MARINELLO, FRANCESCO;
2005
Abstract
Application of a large range AFM to conventional roughness analysis is presented, through a series of measurements on different roughness calibration standards. After extraction of single profiles from the three-dimensional data set, roughness can be evaluated in compliance with ISO standards. Profiles from the large range AFM were compared with those obtained using a traceable stylus instrument. The results show a good agreement, in particular when artefacts with higher roughness are measured.
File in questo prodotto:
Non ci sono file associati a questo prodotto.
Pubblicazioni consigliate
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
