Sequential ion implantation in dielectric matrix determines three different cluster morphologies: separated systems, alloy clusters and core-shell clusters. Post-implantation thermal treatments influence the alloy stability as a function of the annealing atmosphere (oxidizing, inert or reducing). Case studies will be given for the three different structures.
Alloy nanoclusters in dielectric matrix
MATTEI, GIOVANNI
2002
Abstract
Sequential ion implantation in dielectric matrix determines three different cluster morphologies: separated systems, alloy clusters and core-shell clusters. Post-implantation thermal treatments influence the alloy stability as a function of the annealing atmosphere (oxidizing, inert or reducing). Case studies will be given for the three different structures.
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