Identification of an equivalent model for the permanent magnets of a magnetron sputtering device

Aim of the work was to obtain an auxiliary instrument able to give the magnetic configuration of a magnetron sputtering device for operation with targets, magnetic and non magnetic, with different heights, starting from a device with no detailed information of the source. An inverse problem has been dealt with. A 2D numerical analysis has been performed, which utilizes as starting point a model identified with a simple analytical procedure based on measurements. A satisfactory equivalent model has been identified, and validated in several different conditions. The proposed approach can be applied when no detailed information of the source is available, in the case of a cathode without a ferromagnetic yoke.