Simulations of parallel electrode glow discharge and comparison with experimental results

This paper uses COMSOL Multiphysics simulations and experiments to provide insight into the plasma features of a parallel electrode DC glow discharge system. Nitrogen gas has been selected for plasma discharge due to its widespread use in plasma nitriding, which enhances the tribological properties of materials. The study looks at how DC power changes the important plasma parameters, like the electron temperature and the electron number density, while keeping the gas pressure the same. Additionally, the effect of varying gas-filled pressure was analyzed with fixed DC power. Experimental validation is carried out in a cylindrical shaped vacuum chamber with the same geometric configuration and input conditions. The comparison between simulated results and experimental outcomes shows a similar trend, although the magnitudes of simulated results are a little bit higher. This variation may be due to differences between theoretical modeling and actual plasma behavior. Based on these observations, the discharge system has been optimized for precise pressure and power conditions to improve its effectiveness in plasma nitriding applications. The findings contribute to better control and efficiency in plasma-based surface treatment processes.